Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/6694
Full metadata record
DC FieldValueLanguage
dc.contributor.authorFeng, Junbo-
dc.contributor.authorChen, Yao-
dc.contributor.authorBlair, John-
dc.contributor.authorKurt, Hamza-
dc.contributor.authorHao, Ran-
dc.contributor.authorCitrin, D. S.-
dc.contributor.authorZhou, Zhiping-
dc.date.accessioned2021-09-11T15:43:13Z-
dc.date.available2021-09-11T15:43:13Z-
dc.date.issued2009en_US
dc.identifier.issn1071-1023-
dc.identifier.urihttps://doi.org/10.1116/1.3079662-
dc.identifier.urihttps://hdl.handle.net/20.500.11851/6694-
dc.description.abstractIn this article, the fabrication process of annular photonic crystals on silicon-on-insulator wafers was addressed for the first time. A self-alignment procedure for nanofabrication using atomic layer deposition and sacrificial etching was established to place accurately nanosized dielectric rods in nanosized circular air holes. Avoiding the challenging electron-beam lithography alignment, this method achieves atomic level precision and shows high stability. (C) 2009 American Vacuum Society. [DO]: 10.1116/1.3079662]en_US
dc.language.isoenen_US
dc.publisherA V S Amer Inst Physicsen_US
dc.relation.ispartofJournal of Vacuum Science & Technology Ben_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subject[No Keywords]en_US
dc.titleFabrication of Annular Photonic Crystals by Atomic Layer Deposition and Sacrificial Etchingen_US
dc.typeArticleen_US
dc.departmentFaculties, Faculty of Engineering, Department of Electrical and Electronics Engineeringen_US
dc.departmentFakülteler, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümütr_TR
dc.identifier.volume27en_US
dc.identifier.issue2en_US
dc.identifier.startpage568en_US
dc.identifier.endpage572en_US
dc.authorid0000-0002-5064-0511-
dc.identifier.wosWOS:000265839400004en_US
dc.identifier.scopus2-s2.0-64549127418en_US
dc.institutionauthorKurt, Hamza-
dc.identifier.doi10.1116/1.3079662-
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
item.openairetypeArticle-
item.languageiso639-1en-
item.grantfulltextnone-
item.fulltextNo Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
crisitem.author.dept02.5. Department of Electrical and Electronics Engineering-
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
Show simple item record



CORE Recommender

SCOPUSTM   
Citations

25
checked on Dec 21, 2024

WEB OF SCIENCETM
Citations

30
checked on Oct 5, 2024

Page view(s)

72
checked on Dec 16, 2024

Google ScholarTM

Check




Altmetric


Items in GCRIS Repository are protected by copyright, with all rights reserved, unless otherwise indicated.