Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/5795
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dc.contributor.authorYaşar, Abdullah İrfan-
dc.contributor.authorYıldız, Fikret-
dc.date.accessioned2021-09-11T15:20:05Z-
dc.date.available2021-09-11T15:20:05Z-
dc.date.issued2019en_US
dc.identifier.citation3rd International Symposium on Multidisciplinary Studies and Innovative Technologies, ISMSIT 2019, 11 October 2019 through 13 October 2019, , 156063en_US
dc.identifier.isbn9781728137896-
dc.identifier.urihttps://doi.org/10.1109/ISMSIT.2019.8932848-
dc.identifier.urihttps://hdl.handle.net/20.500.11851/5795-
dc.description.abstractResearch on Capacitive Micromachined Ultrasonic Transducers (CMUT), which is MEMS-based new transducer technology compared to piezoelectric in ultrasound applications, has recently increased. It is an important fact that micro and nano technologies provide convenience in many areas. CMUT technology has many advantages, such as its small size, the ease of integration with electronic materials and its compatibility with 2-dimensional geometries. In this study, the effect of different membrane material properties on displacement and output pressure of the CMUT membrane was investigated by assuming that it works in CMUT transmission mode and in the water media. SiC, Si, diamond, Si3N4, and polysilicon were used as membrane material. The membrane radius and thickness were selected as 60 ?m and 2.6 ?m, respectively. Collapse voltage and impedance values were calculated according to the structural properties of these materials. In addition, the mechanical structure of CMUT was taken into consideration and modeling was performed. Using this model created in the SIMULINK, the displacement and output pressure of CMUT membrane under various DC and AC voltages were analyzed. Under the same DC voltage, silicon membrane had the highest displacement and diamond membrane had the lowest displacement. Square shape wave was used as the AC excitation signal because the square wave was more efficient than the others. Some properties of the AC signal were changed and their effects were investigated. The most suitable material and working environment were tried to be found. Moreover, Si3Ni4 membrane behavior also investigated under different electric field to understand effects of electrode size using same model in air. As a result, this study aims to contribute to efficient CMUT design and determination of optimum parameters and membrane material selection for various applications in the immersion and air. © 2019 IEEE.en_US
dc.description.sponsorshipFM18BAP5en_US
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineers Inc.en_US
dc.relation.ispartof3rd International Symposium on Multidisciplinary Studies and Innovative Technologies, ISMSIT 2019 - Proceedingsen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectCMUTen_US
dc.subjectPoly-Sien_US
dc.subjectSi3Ni4en_US
dc.subjectsiliconen_US
dc.subjectSIMULINKen_US
dc.titleInvestigation of Different Membrane Materials Effects in Cmut Membrane Behaviouren_US
dc.typeConference Objecten_US
dc.departmentInstitutes, Graduate School of Engineering and Science, Biomedical Engineering Graduate Programsen_US
dc.identifier.scopus2-s2.0-85078021327en_US
dc.institutionauthorYaşar, Abdullah İrfan-
dc.identifier.doi10.1109/ISMSIT.2019.8932848-
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.relation.conference3rd International Symposium on Multidisciplinary Studies and Innovative Technologies, ISMSIT 2019en_US
item.openairetypeConference Object-
item.languageiso639-1en-
item.grantfulltextnone-
item.fulltextNo Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
Appears in Collections:Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
Öğrenci Yayınları / Students' Publications
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