Please use this identifier to cite or link to this item:
https://hdl.handle.net/20.500.11851/4061
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Köymen, H. | - |
dc.contributor.author | Ahıska, Y. | - |
dc.contributor.author | Atalar, A. | - |
dc.contributor.author | Köymen, Itır | - |
dc.contributor.author | Taşdelen, A. S. | - |
dc.contributor.author | Yılmaz, M. | - |
dc.date.accessioned | 2021-01-25T11:32:58Z | - |
dc.date.available | 2021-01-25T11:32:58Z | - |
dc.date.issued | 2020-09 | |
dc.identifier.citation | Koymen, H., Ahiska, Y., Atalar, A., Köymen, I., Tasdelen, A. S., and Yilmaz, M. (2020, September). Mic-in-CMOS: CMUT as a Sealed-Gap Capacitive Microphone. In 2020 IEEE International Ultrasonics Symposium (IUS) (pp. 1-4). IEEE. | en_US |
dc.identifier.isbn | 978-172815448-0 | |
dc.identifier.issn | 19485719 | |
dc.identifier.uri | https://hdl.handle.net/20.500.11851/4061 | - |
dc.identifier.uri | https://ieeexplore.ieee.org/document/9251557 | - |
dc.description.abstract | The design and production of a CMOS compatible, watertight and ingress-proof CMUT (capacitive micromachined ultrasonic transducer) microphone, mic-in-CMOS, with vacuum-gap is described. We present an analytical model-based approach for the design of mic-in-CMOS, where a basis for quantitative comparison of performance trade-offs is provided. The sealed vacuum gap of the mic-in-CMOS is basically a lossless sensor, free of mechanical noise. Its SNR is determined by the noise of the pre-amplification electronics (the noise contributor in a CMUT with vacuum gap is essentially the radiation resistance, which is less than 0 dBA for audio band for a 1 mm2 device). The design of mic-in-CMOS involves many multilateral trade-offs such as gap height vs membrane thickness vs sensitivity vs need for linear operation vs bias voltage and atmospheric depression, to name few. The mic-in-CMOS design can be mass produced using CMOS film stacks only, as such the fabrication process can be carried out entirely in a CMOS processes production line complemented with CMOS compatible post-processing approaches. Mic-in-CMOS has the advantage of low production cost with minimal packaging requirement and on-die EMI / EMC. © 2020 IEEE. | en_US |
dc.language.iso | en | en_US |
dc.publisher | IEEE Computer Society | en_US |
dc.relation.ispartof | 2020 IEEE International Ultrasonics Symposium (IUS) | en_US |
dc.rights | info:eu-repo/semantics/closedAccess | en_US |
dc.subject | Capacitive microphone | en_US |
dc.subject | CMOS | en_US |
dc.subject | CMUT | en_US |
dc.subject | MEMS | en_US |
dc.subject | Sealed gap | en_US |
dc.title | Mic-in-CMOS: CMUT as a Sealed-Gap Capacitive Microphone | en_US |
dc.type | Conference Object | en_US |
dc.department | Faculties, Faculty of Engineering, Department of Electrical and Electronics Engineering | en_US |
dc.department | Fakülteler, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümü | tr_TR |
dc.authorid | 0000-0002-7233-2704 | - |
dc.identifier.wos | WOS:000635688900253 | en_US |
dc.identifier.scopus | 2-s2.0-85097894617 | en_US |
dc.institutionauthor | Köymen, Itır | - |
dc.identifier.doi | 10.1109/IUS46767.2020.9251557 | - |
dc.relation.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
dc.identifier.scopusquality | - | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.grantfulltext | none | - |
item.fulltext | No Fulltext | - |
item.languageiso639-1 | en | - |
item.openairetype | Conference Object | - |
crisitem.author.dept | 02.5. Department of Electrical and Electronics Engineering | - |
Appears in Collections: | Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
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